Analysis of production control methods for semiconductor research and development fabs using simulation.
Vikram RamamurthiMichael E. KuhlKarl D. HirschmanPublished in: WSC (2005)
Keyphrases
- case study
- computational cost
- real time
- artificial intelligence
- preprocessing
- quantitative analysis
- machine learning methods
- semiconductor manufacturing
- simulation tool
- control problems
- control method
- mathematical models
- qualitative and quantitative
- mathematical model
- benchmark datasets
- significant improvement
- image analysis
- data analysis
- reinforcement learning
- search engine
- neural network