Wafer Edge Yield Prediction Using a Combined Long Short-Term Memory and Feed- Forward Neural Network Model for Semiconductor Manufacturing.
Dasol KimMintae KimWooju KimPublished in: IEEE Access (2020)
Keyphrases
- semiconductor manufacturing
- feed forward
- neural network model
- recurrent neural networks
- long short term memory
- artificial neural networks
- neural network
- back propagation
- discrete event simulation
- multi layer perceptron
- process control
- neural nets
- prediction model
- bp neural network
- biologically plausible
- forecasting accuracy
- neural models
- hidden layer
- network architecture
- input variables
- production system
- recurrent networks
- rbf neural network
- multilayer perceptron
- back propagation neural network
- visual cortex
- activation function
- dynamic characteristics
- error back propagation
- control system
- feedforward neural networks
- radial basis function
- neural model
- multi layer
- hopfield network
- dynamic programming
- data fusion