Optimized inspection capacity for out of control detection in semiconductor manufacturing.
Israel TirkelPublished in: WSC (2012)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- control system
- detection method
- automatic detection
- change detection
- control method
- object detection
- detection algorithm
- false positives
- neural network
- learning algorithm
- medical images
- anomaly detection
- database
- production system
- false alarms
- detection accuracy
- real world
- data sets