Fast lithographic mask optimization considering process variation.

Yu-Hsuan Su Yu-Chen Huang Liang-Chun Tsai Yao-Wen Chang Shayak Banerjee

Published in: ICCAD (2014)

Keyphrases

optimization process
decision making
optimization algorithm
optimization method
real world
image processing
three dimensional
multi agent systems
lower bound
artificial neural networks
linear programming
constrained optimization
diffusion process