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Process control based on PCA models.
Luís Brito Palma
Fernando Vieira Coito
Paulo Sousa Gil
Rui Neves-Silva
Published in:
ETFA (2010)
Keyphrases
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process control
control system
statistical models
data sets
probabilistic model
principal component analysis
intelligent control
neural network
computer vision
bayesian networks
model selection
process model
linear discriminant analysis
semiconductor manufacturing