Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement.
Chen-Fu ChienChiao-Wen LiuShih-Chung ChuangPublished in: Int. J. Prod. Res. (2017)
Keyphrases
- big data
- root cause
- semiconductor manufacturing
- cloud computing
- data analysis
- big data analytics
- discrete event simulation
- data processing
- process control
- unstructured data
- data management
- social media
- vast amounts of data
- data intensive
- high volume
- massive data
- business intelligence
- data science
- production system
- knowledge discovery
- data sets
- data warehousing
- multistage
- decision making
- predictive modeling
- social computing
- data mining
- databases
- health informatics