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Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using Magnetic Resonance Coupling for Stress Free Polishing Application.
Zilian Qu
Wensong Wang
Shuhui Yang
Quqin Sun
Zhongyuan Fang
Yuanjin Zheng
Published in:
IEEE Access (2019)
Keyphrases
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magnetic resonance
mr images
medical images
image registration
brain images
image data
x ray
mr imaging
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brain image segmentation
pattern recognition
magnetic resonance images
partial volume
cardiac motion
mr brain