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A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer.

Manjunath R. VenkateshSumit SachdevaBrahim El MansouriJia WeiAndre BosscheDuco BosmaLouis C. P. M. de SmetErnst J. R. SudhölterGuo Qi Zhang
Published in: Sensors (2019)
Keyphrases
  • low power
  • power consumption
  • low cost
  • high speed
  • single chip
  • logic circuits
  • image processing
  • ultra low power
  • real time
  • infrared
  • high power
  • vlsi circuits