Adaptive Optical Proximity Correction Using an Optimization Method.
Tetsuaki MatsunawaHirokazu NosatoHidenori SakanashiMasahiro MurakawaEiichi TakahashiTsuneo TerasawaToshihiko TanakaOsamu SugaTetsuya HiguchiPublished in: CIT (2007)
Keyphrases
- optimization method
- optimization methods
- optimization algorithm
- optimization process
- evolutionary algorithm
- simulated annealing
- differential evolution
- global optimum
- optimization procedure
- genetic algorithm
- nonlinear optimization
- particle swarm
- neural network
- nelder mead simplex
- metaheuristic
- hybrid algorithm
- particle swarm optimization
- fitness function
- natural images
- global optimization
- language model
- search algorithm
- quasi newton