Detection of Defects on SiC Substrate by SEM and Classification Using Deep Learning.
Shota MonnoYoshifumi KamadaHiroyoshi MiwaKoji AshidaTadaaki KanekoPublished in: INCoS (2018)
Keyphrases
- deep learning
- unsupervised learning
- machine learning
- pattern recognition
- restricted boltzmann machine
- decision trees
- feature selection
- image classification
- support vector
- feature vectors
- model selection
- viewpoint
- object detection
- supervised learning
- training set
- text classification
- online learning
- feature space
- learning strategies
- image segmentation