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On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse.

Tao TangYansheng HaoYigang ShenYo TanakaMing HuangYoichiroh HosokawaMing LiYaxiaer Yalikun
Published in: IROS (2020)
Keyphrases
  • high speed
  • modular design
  • low cost
  • data integration
  • database
  • real world
  • data sets
  • databases
  • data sources
  • signal to noise ratio
  • information integration
  • impulse noise
  • physical world