EUV-CDA: Pattern shift aware critical density analysis for EUV mask layouts.

Abde Ali Kagalwalla Michale Lam Kostas Adam Puneet Gupta

Published in: ASP-DAC (2014)

Keyphrases

data analysis
databases
artificial intelligence
decision making
image sequences
pattern matching
data sets
real world
learning algorithm
clustering algorithm
pattern recognition
artificial neural networks
multiresolution
medical images
statistical analysis