Commercial Production of Low-k PZT film using Sputtering Method.
Mario KiuchiRyoma MiyakeShinya YoshidaShuji TanakaTsuyoshi TakemotoYukitaka YamaguchiKenji KomakiPublished in: IEEE SENSORS (2020)
Keyphrases
- significant improvement
- detection method
- preprocessing
- computational cost
- similarity measure
- classification method
- experimental evaluation
- synthetic data
- theoretical analysis
- computational complexity
- optimization method
- fully automatic
- detection algorithm
- support vector machine svm
- cost function
- k means
- clustering method
- markov random field
- mutual information
- dynamic programming
- high precision
- evaluation method