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Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers.
Dae-Kyu Kim
Tae-Eog Lee
Hyun-Jung Kim
Published in:
IEEE Trans Autom. Sci. Eng. (2016)
Keyphrases
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optimal scheduling
database
artificial intelligence
clustering algorithm
software tools
databases
end users
steady state
scheduling algorithm
parallel computing