Sign in
An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal.
Ye Chen
Jin Qian
Xinyan Guo
Yan Xing
Published in:
NEMS (2021)
Keyphrases
</>
level set
objective function
energy function
prior knowledge
active contours
energy functional
finite difference
level set framework
integrated circuit
evolution process
level set based segmentation