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A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting.

Naiqi WuMengChu ZhouFeng ChuChengbin Chu
Published in: IEEE Trans. Syst. Man Cybern. Syst. (2013)
Keyphrases
  • scheduling strategy
  • scheduling algorithm
  • clustering algorithm
  • grid computing
  • data mining
  • multi agent
  • response time
  • integrated circuit