Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model.
Kamil Erkan KabakCathal HeaveyVincent CorbettPublished in: WSC (2008)
Keyphrases
- process model
- conceptual model
- colored petri nets
- experimental data
- statistical model
- multiple models
- computational model
- petri net
- cost function
- formal model
- real world
- decision trees
- probabilistic model
- mathematical model
- high level
- information retrieval
- parameter estimation
- design methodology
- empirical data
- reasoning process
- data analysis
- neural network