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Thermal Stability Simulation of MEMS Micro Scanner - Multi-physics Simulations Coupled with Experimental Verifications.

Seungoh HanChang-Hyeon JiJae-Hyoung ParkJong-Uk Bu
Published in: SIMULTECH (2016)
Keyphrases
  • simulation model
  • simulation models
  • simulation tools
  • real time
  • real world
  • database
  • artificial intelligence
  • finite element model
  • fluid dynamics