Anomalous Wafer Map Detection and Localization using Unsupervised Learning.
Lin ZhaoChai Kiat YeoPublished in: ICICDT (2023)
Keyphrases
- unsupervised learning
- anomaly detection
- detecting anomalous
- activity detection
- detection method
- detection algorithm
- supervised learning
- accurate localization
- model selection
- semiconductor manufacturing
- intrusion detection
- deep learning
- detection accuracy
- reliable detection
- false alarms
- anomalous behavior
- automatic detection
- detection rate
- false positives
- loop closing
- semi supervised
- event detection
- integrated circuit
- data sets
- object detection
- feature extraction
- neural network