FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing.
Jingjie WuLei ZhouPublished in: CoRR (2023)
Keyphrases
- lightweight
- high throughput
- microarray
- genome wide
- biological data
- systems biology
- data acquisition
- high precision
- proteomic data
- dna sequencing
- genomic data
- protein protein interactions
- low latency
- gene expression
- wireless sensor networks
- dos attacks
- development environments
- authentication protocol
- image analysis
- data mining
- automated image analysis
- mass spectrometry data
- development environment
- rfid tags