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Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing.

Jules TillementCyril CerveraJacques BayletChristophe JanyFrançois NardelliThomas Di RitoSylvain GeorgesGabriel MugnyOlivier SaxodOlivier GravrandThierry BaronFrançois RoyFrédéric Boeuf
Published in: Sensors (2023)
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