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Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers.
Atsushi Isobe
Yudai Kamada
Takashi Oshima
Yuki Furubayashi
Noriyuki Sakuma
Chisaki Takubo
Yasushi Tainaka
Keiki Watanabe
Tomonori Sekiguchi
Published in:
IEEE SENSORS (2018)
Keyphrases
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design methodology
case study
multiscale
user interface
design process
design decisions
databases
learning environment
building blocks
design principles
engineering design
optimal design
image noise