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Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process.
Marzieh Khakifirooz
Chen Fu Chien
Mahdi Fathi
Panos M. Pardalos
Published in:
IEEE Trans. Ind. Informatics (2020)
Keyphrases
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optimization process
databases
management system
data processing
wide range
decision support
real time
data sets
information retrieval
worst case
knowledge management
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optimization algorithm
global optimization
information management
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