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ΣΔ Effects and Charge Locking in Capacitive MEMS Under Dielectric Charge Control.

Panagiotis GiounanlisSergi GorretaManuel Domínguez PumarJoan Pons-NinOrla FeelyElena Blokhina
Published in: IEEE Trans. Circuits Syst. II Express Briefs (2017)
Keyphrases
  • charge coupled devices
  • control system
  • optimal control
  • data acquisition
  • databases
  • management system
  • concurrency control
  • control strategy
  • control problems