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Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach.

Ramin MirzazadehSaeed Eftekhar AzamStefano Mariani
Published in: Sensors (2018)
Keyphrases
  • random access memory
  • black box
  • database
  • real time
  • low voltage