Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control.
Junmo KooDaegeun HaDamdae ParkHyun-Joon RohSangwon RyuGon-Ho KimKye Hyun BaekChonghun HanPublished in: Comput. Chem. Eng. (2017)
Keyphrases
- real time
- control system
- real time control
- controller design
- control strategy
- control loop
- design procedure
- data acquisition
- working principle
- virtual instrument
- diesel engine
- control signals
- control structure
- control architecture
- fuzzy controller
- control method
- control algorithm
- fuzzy logic controller
- real time embedded
- control rules
- control strategies
- control parameters
- control theory
- control scheme
- thin film
- infrared
- disturbance rejection
- design process
- vision system
- proportional integral derivative
- closed loop
- optimal control