Effect of RF sputtering parameters on PZT crystal growth.
Miao YuTim GiffneyKean C. AwHaixia ZhangPublished in: NEMS (2013)
Keyphrases
- input parameters
- database
- parameter settings
- fine tuning
- artificial intelligence
- parameter selection
- expectation maximization
- parameter values
- cellular automata
- maximum likelihood estimation
- probability density function
- sensitivity analysis
- parameter estimation
- high dimensional
- expert systems
- search algorithm
- three dimensional
- genetic algorithm