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Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity.
Yomna M. Eltagoury
Mostafa Soliman
Yasser M. Sabry
Mohammed Alotaibi
Diaa A. Khalil
Published in:
Micromachines (2016)
Keyphrases
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angular velocity
translational motion
electric field
wide range
high precision
image formation
genetic algorithm
three dimensional
optical flow
neural network
information systems
degrees of freedom
hard disk drive