Conformal and Ultra Shallow Junction Formation Achieved Using a Pulsed-Laser Annealing Process Integrated With a Modified Plasma Assisted Doping Method.
Seunghun BaikDong-Jae KwonHongki KangJae Eun JangJaewon JangY. S. KimHyuk-Jun KwonPublished in: IEEE Access (2020)
Keyphrases
- high accuracy
- experimental evaluation
- computational complexity
- cost function
- dynamic programming
- detection method
- preprocessing
- multiresolution
- neural network
- support vector machine svm
- knn
- high precision
- classification method
- segmentation method
- detection algorithm
- optimization algorithm
- segmentation algorithm
- information extraction
- pairwise
- similarity measure
- decision trees