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Consideration of the fringe effects of capacitors in micro accelerometer design.

Wu ZhouHongfang LanHuijun YuLiushan LaiBei PengXiaoping He
Published in: Trans. Inst. Meas. Control (2018)
Keyphrases
  • design process
  • design space
  • genetic algorithm
  • data sets
  • user interface
  • knowledge based systems
  • design tools
  • optimal design