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Next-generation virtual metrology for semiconductor manufacturing: A feature-based framework.
Kerul Suthar
Devarshi Shah
Jin Wang
Q. Peter He
Published in:
Comput. Chem. Eng. (2019)
Keyphrases
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semiconductor manufacturing
machine learning
multiscale
main contribution
conceptual framework
neural network
real world
artificial intelligence
three dimensional
dynamic programming
discrete event simulation