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Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer.
Awatef Khlifi
Aftab Ahmed
Brahim Mezghani
Rajul Patkar
Pradeep Dixit
Fares Tounsi
Maryam Shojaei Baghini
Published in:
Microelectron. J. (2022)
Keyphrases
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