A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing.
Chen-Fu ChienChia-Yu HsuPublished in: J. Intell. Manuf. (2006)
Keyphrases
- fully automatic
- high accuracy
- high precision
- preprocessing
- computationally efficient
- probabilistic model
- dynamic programming
- semiconductor manufacturing
- support vector machine
- experimental evaluation
- cost function
- significant improvement
- evolutionary algorithm
- pairwise
- theoretical analysis
- detection method
- synthetic data
- feature space
- neural network
- optimization method
- real time