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Pattern Alignment Method Based on Consistency Among Local Registration Candidates for LSI Wafer Pattern Inspection.
Takashi Hiroi
Chie Shishido
Masahiro Watanabe
Published in:
WACV (2002)
Keyphrases
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image alignment
cost function
pattern matching
support vector machine
high accuracy
dynamic programming
image processing
significant improvement
medical images
cross correlation
lookup table
partially overlapping
point pattern matching