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Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes.

Qing ZhengLili DongZhiqiang Gao
Published in: CCA (2007)
Keyphrases
  • control system
  • control method
  • estimation accuracy
  • robotic systems
  • estimation error
  • process control
  • geometric distortions
  • sagittal plane