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Coordinate measurement on wafer level - From single sensors to sensor arrays.

T. KrahA. WedmannK. KnielF. HartigN. FerreiraStephanus Büttgenbach
Published in: ICST (2013)
Keyphrases
  • real time
  • learning algorithm
  • data structure
  • data fusion
  • higher level
  • levels of abstraction
  • data sets
  • sensor networks
  • sensor data
  • data mining
  • machine learning
  • social networks
  • decision making
  • multiscale
  • mobile robot