Continuous flow transport scheduling for conveyor-based AMHS in wafer fabs.
Clemens SchwenkeKlaus KabitzschPublished in: WSC (2017)
Keyphrases
- wafer fabrication
- scheduling problem
- flow field
- scheduling algorithm
- resource constraints
- response time
- integrated circuit
- dynamic scheduling
- manufacturing cell
- information systems
- dynamic programming
- wireless sensor networks
- resource allocation
- search engine
- special case
- multiple objectives
- bayesian networks
- round robin
- semiconductor manufacturing