Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting.
Angzhi FanYu HuangFei XuSthitie BomPublished in: Sensors (2023)
Keyphrases
- regression model
- sensor networks
- support vector regression
- prediction model
- sensor fusion
- semiconductor manufacturing
- regression methods
- data acquisition
- image sensor
- sensor data
- linear model
- camera calibration
- short term
- model selection
- sensing devices
- wireless sensor networks
- explanatory variables
- regression analysis
- survival analysis
- generalized linear models
- gaussian process
- process control
- sensing modalities
- forecasting model
- integrated circuit
- linear regression model
- locally weighted
- logistic regression models
- generalized linear
- regression trees
- interval valued data
- multivariate regression
- kernel regression
- target variable
- mobile sensor
- independent variables
- neural network
- predictive model