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CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing.
Martin Nirschl
Arto Rantala
Kari Tukkiniemi
Sanna Auer
Ann-Charlotte Hellgren
Dana Pitzer
Matthias Schreiter
Inger Vikholm-Lundin
Published in:
Sensors (2010)
Keyphrases
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low cost
high speed
low power
underwater acoustic
underwater vehicles
real time
machine learning
image processing
circuit design
cmos technology
vlsi circuits
acoustic signal