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Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study.
Chen-Fu Chien
Ying-Jen Chen
Jei-Zheng Wu
Published in:
WSC (2016)
Keyphrases
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empirical studies
semiconductor manufacturing
process control
discrete event simulation
empirical analysis
real world data sets
uci datasets
modeling tool
data mining
knowledge base
reinforcement learning
knowledge discovery