Defective Wafer Detection Using Sensed Numerical Features.
Kotcharat KitchatChing-Yu LinMin-Te SunPublished in: COINS (2021)
Keyphrases
- false positives
- object detection
- computer vision
- feature extraction
- support vector machine classifier
- image features
- co occurrence
- detection algorithm
- event detection
- sensitivity analysis
- adaboost classifier
- data sets
- detection accuracy
- structural information
- spatial information
- classification accuracy
- low level
- machine learning