A Fuzzy Neural Network Approach for Die Yield Prediction of Wafer Fabrication Line.

Lihui Wu Jie Zhang Gong Zhang

Published in: FSKD (3) (2009)

Keyphrases

fuzzy neural network
prediction model
wafer fabrication
input output
neural network
fuzzy rules
membership functions
fuzzy neural
neuro fuzzy
stepwise regression
fuzzy controller
modeling method
control strategy
data fusion
graphical models
fuzzy clustering
complex systems
fuzzy sets
genetic algorithm
real time