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Wafer Residency Time Analysis for Time-Constrained Single-Robot-Arm Cluster Tools With Activity Time Variation.
Fajun Yang
Xin Tang
Naiqi Wu
Chunjiang Zhang
Liang Gao
Published in:
IEEE Trans. Control. Syst. Technol. (2020)
Keyphrases
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robot arm
clustering algorithm
three dimensional
object recognition
control system
motion estimation
experimental data
motion planning
nonlinear systems