A Nano Positioning Platform for STM and Its Compound Control Algorithm.
Xian-Guang FanYu-Liang ZhiCheng LiaoJie ShenXin WangPublished in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
- control algorithm
- control method
- control system
- control strategy
- adaptive fuzzy
- control law
- temperature control
- design procedure
- real time
- neural network controller
- single phase
- pid control
- nano scale
- matlab simulink
- input output
- fuzzy logic controller
- fuzzy controller
- neural network
- fuzzy control
- sliding mode control
- numerical simulations