A 12-inch wafer prealigner.

Hee-Sub Lee Jae Wook Jeon Joon-Woo Kim Sung-Jong Jung Jong-Eun Byun

Published in: Microprocess. Microsystems (2003)

Keyphrases

semiconductor manufacturing
integrated circuit
disk drives
massively parallel
magnetic tape
solid state
langley research center
wafer fabrication
feature selection
real time
computer vision
information systems
multimedia
probabilistic model
database management systems