Joint optimisation of uncertain distributed manufacturing and preventive maintenance for semiconductor wafers considering multi-energy complementary.
Jun DongChunming YePublished in: Int. J. Prod. Res. (2023)
Keyphrases
- semiconductor manufacturing
- preventive maintenance
- decision making
- process control
- scheduling problem
- maintenance activities
- distributed systems
- genetic algorithm
- peer to peer
- energy consumption
- flowshop
- manufacturing systems
- maintenance cost
- production line
- wafer fabrication
- databases
- production system
- data warehouse
- knowledge discovery