On Balanced Tradeoffs between Stiffness and Design Area in CMOS-MEMS Accelerometer Springs.
Benito Granados-RojasMario Alfredo Reyes-BarrancaLuis Martín Flores-NavaGriselda Stephany Abarca-JimenezMiguel Ángel Aleman-ArceYesenia Eleonor González-NavarroPublished in: CCE (2020)
Keyphrases