Si-based MEMS resonant sensor: A review from microfabrication perspective.

Gulshan Verma Kunal Mondal Ankur Gupta

Published in: Microelectron. J. (2021)

Keyphrases

sensor data
sensor networks
multi sensor
real time
frequency band
databases
information systems
case study
low cost
sensor fusion
multiple perspectives
high sensitivity
sensor web
pulse width