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DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters.

David Sze Wai ChoongDuan Jian GohJihang LiuMantalena SarafianouSrinivas MeruguQing Xin ZhangPeter Hyun Kee ChangAlberto LeottiGoutham KoppisettiNaadaa ZakiyyanHuamao LinChandra BhasettiSagnik GhoshPrakasha Chigahalli RamegowdaDaniel S.-H. ChenJoshua En-Yuan LeeCarlo PreliniDomenico GiustiAlessandro SavoiaYul Koh
Published in: SENSORS (2023)
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