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Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter.
Akira Hirabayashi
Published in:
IEICE Trans. Fundam. Electron. Commun. Comput. Sci. (2010)
Keyphrases
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white light interferometry
thin film
film thickness
noise reduction
object recognition
spectral analysis
spectral characteristics
artificial neural networks
single image
hyperspectral
hyperspectral imagery